Vivek Rao

SPT Micro Technologies USA, Inc. is a leading supplier of vertical batch furnaces for various industries such as MEMS, Power, LED, Semiconductor, III-V, RFID, and packaging device manufacturers. The private company is based in San Jose. The American company offers continued support, spares, and upgrades for Atmospheric Pressure CVD of SiH4 or TEOS based dielectrics. The company's patented Watkins Johnson (WJ) linear injector technology enables precise, repeatable deposition of doped or un-doped films with no transient film properties and uniform gap fill across the wafer. SPT's expertise in developing novel applications and maximizing system design gives their customers an advantage over the competition. The company offers customized equipment designed to meet their customer's application, configuration, and substrate needs.

SPTS Technologies Ltd. manufactures plasma etch and deposition and thermal processing equipment for the semiconductor industry. Its products include plasma dicing, HF release etch, XeF2 release etch, metal deposition, MVD, PECVD and inkjet printing for IC. The company was founded in 2009 and is headquartered in Newport, the United Kingdom.